• 805-620-0948

Ultratech

Shop 660+ surplus Ultratech parts at VB Industrial Supply, including stepper circuit boards, microscope components, cables and stepper drives.

More about our Ultratech inventory

Ultratech parts we stock

We currently have 660+ Ultratech parts in stock. The most common types:

Popular Ultratech part number series

Series we stock most often include 1052, 1064, 1002, 690, 644, 0564, 1005 and 1024. Search the full Ultratech part number from the search bar to find an exact match, and check the suffix or revision letter against the part you're replacing.

Ultratech surplus parts FAQ

Are these Ultratech parts new or used?

Every listing is graded either New Old Stock, meaning unused surplus that is often still in the original packaging, or Used. The condition is stated on each product page.

How do I find the right Ultratech replacement part?

Search the exact Ultratech part or catalog number from the search bar at the top of the page. If you can't find it, contact us with the part number and we'll check our inventory.

Do you buy surplus Ultratech parts?

Yes. We buy excess, obsolete and decommissioned industrial inventory, including Ultratech parts. Sell us your surplus.

Is VB Industrial Supply an authorized Ultratech distributor?

No. VB Industrial Supply is an independent surplus reseller and is not affiliated with Ultratech. Brand names and part numbers are used only to identify the products we sell.

Showing 433–480 of 665 products
Ultratech Stepper 1056-615600 Rev. A, Fixture Assembly Linear

Ultratech Stepper 1056-615600 Rev. A, Fixture Assembly Linear Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper 1056-615600 Rev. A, Fixture Assembly Linear Used condition, with normal signs o...

In Stock
$247.95
Add to cart
Ultratech Stepper 1056-645600 Vexta 2 Phase Stepper Motor Linear

Ultratech Stepper 1056-645600 Vexta 2 Phase Stepper Motor LinearUsed condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper 1056-645600 Vexta 2 Phase Stepper Motor LinearUsed condition, with normal signs...

In Stock
$347.95
Add to cart
Ultratech Stepper Optic Lens Cable Inspection Magnifying

Ultratech Stepper Optic Lens Cable Inspection Magnifying Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper Optic Lens Cable Inspection Magnifying Used condition, with normal signs of wea...

In Stock
$148.95
Add to cart
Ultratech Stepper 05-08-03189 Rev. A Cable Assembly Connector Plug

Ultratech Stepper 05-08-03189 Rev. A Cable Assembly Connector PlugUsed condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper 05-08-03189 Rev. A Cable Assembly Connector PlugUsed condition, with normal sig...

In Stock
$22.95
Add to cart
Ultratech Stepper 1064-701065 17-1/2'' Theta Wafer Fixture Assembly

Ultratech Stepper 1064-701065 17-1/2" Theta Wafer Fixture AssemblyUsed condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper 1064-701065 17-1/2" Theta Wafer Fixture AssemblyUsed condition, with normal sig...

In Stock
$176.95
Add to cart
Ultratech Stepper 03-15-02049 PCB, BREAKOUT, WAS Rev. A Board Module

Ultratech Stepper 03-15-02049 PCB, BREAKOUT, WAS Rev. A Board ModuleUsed condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper 03-15-02049 PCB, BREAKOUT, WAS Rev. A Board ModuleUsed condition, with normal s...

In Stock
$104.95
Add to cart
Ultratech Stepper 03-20-01843 BD Breakout 15 Volt PCB Module

Ultratech Stepper 03-20-01843 BD Breakout 15 Volt PCB Module Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper 03-20-01843 BD Breakout 15 Volt PCB Module Used condition, with normal signs of...

In Stock
$69.95
Add to cart
Ultratech Stepper, UTS, Lens Filter Reticle Housing Fixture, 4-7/8'' OAL

Ultratech Stepper, UTS, Lens Filter Reticle Housing Fixture, 4-7/8" OAL Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper, UTS, Lens Filter Reticle Housing Fixture, 4-7/8" OAL Used condition, with norm...

In Stock
$36.95
Add to cart
Ultratech Stepper 03-20-01849 BD, Breakout, 24 VOLT PCB

Ultratech Stepper 03-20-01849 BD, Breakout, 24 VOLT PCB Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper 03-20-01849 BD, Breakout, 24 VOLT PCB Used condition, with normal signs of wear...

In Stock
$69.95
Add to cart
Ultratech Stepper 1025-588400 Rev. C SPIDER, Theta Stage Chuck Wafer

Ultratech Stepper 1025-588400 Rev. C SPIDER, Theta Stage Chuck Wafer Includes everything as shown AS-ISUsed condition, with normal signs of wear. Comes as shown, please...

Ultratech Stepper 1025-588400 Rev. C SPIDER, Theta Stage Chuck Wafer Includes everything as shown...

In Stock
$105.95
Add to cart
Ultratech Stepper SPIDER, Theta Stage Chuck Wafer

Ultratech Stepper SPIDER, Theta Stage Chuck Wafer  Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper SPIDER, Theta Stage Chuck Wafer  Used condition, with normal signs of wear. Com...

In Stock
$45.95
Add to cart
NEW Ultratech Stepper 5-1/2'' Wafer Chuck Housing Assembly

NEW Ultratech Stepper 5-1/2" Wafer Chuck Housing AssemblyNOS, surplus

NEW Ultratech Stepper 5-1/2" Wafer Chuck Housing AssemblyNOS, surplus

In Stock
$69.95
Add to cart
NEW Ultratech Stepper 0566-700402 Rev. B Cable Assembly

NEW Ultratech Stepper 0566-700402 Rev. B Cable Assembly NOS, surplus

NEW Ultratech Stepper 0566-700402 Rev. B Cable Assembly NOS, surplus

In Stock
$22.95
Add to cart
Semifusion 240 PEN Motor Drive Assembly Ultratech Stepper UltraStep 1000

Semifusion 240 PEN Motor Drive Assembly Ultratech Stepper UltraStep 1000 Unit only as shownUsed condition, with normal signs of wear. Comes as shown, please check...

Semifusion 240 PEN Motor Drive Assembly Ultratech Stepper UltraStep 1000 Unit only as shownUsed c...

In Stock
$118.95
Add to cart
Ultratech Stepper 03-15-05643 Dual Stack Reticle Library PCB Board Module

Ultratech Stepper 03-15-05643 Dual Stack Reticle Library PCB Board Module Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper 03-15-05643 Dual Stack Reticle Library PCB Board Module Used condition, with no...

In Stock
$92.95
Add to cart
Ultratech Stepper 03-15-05643 Theta Vac/Chuck Clamp Board PCB 4700 Titan

Ultratech Stepper 03-15-05643 Theta Vac/Chuck Clamp Board PCB 4700 TitanUsed condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper 03-15-05643 Theta Vac/Chuck Clamp Board PCB 4700 TitanUsed condition, with norm...

In Stock
$92.95
Add to cart
Ultratech Stepper, UTS, 24.6H2.6, Laser Optic Test Reticle

Ultratech Stepper, UTS, 24.6H2.6, Laser Optic Test Reticle Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper, UTS, 24.6H2.6, Laser Optic Test Reticle Used condition, with normal signs of w...

In Stock
$22.95
Add to cart
Ultratech Stepper, UTS, Optical Lens Piece, 1'' W x 5/8''

Ultratech Stepper, UTS, Optical Lens Piece, 1" W x 5/8" Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper, UTS, Optical Lens Piece, 1" W x 5/8" Used condition, with normal signs of wear...

In Stock
$9.95
Add to cart
Ultratech Stepper 1015-04438 Rev. A Vacuum Transfer Arm Pressure Panel

Ultratech Stepper 1015-04438 Rev. A Vacuum Transfer Arm Pressure Panel Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper 1015-04438 Rev. A Vacuum Transfer Arm Pressure Panel Used condition, with norma...

In Stock
$22.95
Add to cart
Ultratech Stepper, UTS, Laser Optic Prism Reticle Fixture, 690-0130-001

Ultratech Stepper, UTS, Laser Optic Prism Reticle Fixture, 690-0130-001Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper, UTS, Laser Optic Prism Reticle Fixture, 690-0130-001Used condition, with norma...

In Stock
$80.95
Add to cart
Ultratech Stepper 05-15-02103-05 Rev. A Ribbon Cable Assembly

Ultratech Stepper 05-15-02103-05 Rev. A Ribbon Cable Assembly Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper 05-15-02103-05 Rev. A Ribbon Cable Assembly Used condition, with normal signs o...

In Stock
$10.95
Add to cart
Ultratech Stepper 05-15-02571 Rev. A Cable Assembly

Ultratech Stepper 05-15-02571 Rev. A Cable Assembly Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper 05-15-02571 Rev. A Cable Assembly Used condition, with normal signs of wear. Co...

In Stock
$9.95
Add to cart
Ultratech Stepper, UTS, Laser Optic Reticle Fixture, 4-1/4'' OAL x 2'' W

Ultratech Stepper, UTS, Laser Optic Reticle Fixture, 4-1/4" OAL x 2" W Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper, UTS, Laser Optic Reticle Fixture, 4-1/4" OAL x 2" W Used condition, with norma...

In Stock
$61.95
Add to cart
Ultratech Stepper 05-15-04915 Cable Assembly Part

Ultratech Stepper 05-15-04915 Cable Assembly Part  Comes as shownUsed condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper 05-15-04915 Cable Assembly Part  Comes as shownUsed condition, with normal sign...

In Stock
$18.95
Add to cart
Ultratech Stepper, UTS, Laser Optic Filter Lens Fixture, 4-7/8'' OAL x 4-1/2'' W

Ultratech Stepper, UTS, Laser Optic Filter Lens Fixture, 4-7/8" OAL x 4-1/2" W Used condition, with normal signs of wear. Comes as shown, please check pics....

Ultratech Stepper, UTS, Laser Optic Filter Lens Fixture, 4-7/8" OAL x 4-1/2" W Used condition, wi...

In Stock
$92.95
Add to cart
Ultratech Stepper 690-8110-001 Cable Assembly

Ultratech Stepper 690-8110-001 Cable Assembly Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper 690-8110-001 Cable Assembly Used condition, with normal signs of wear. Comes as...

In Stock
$9.95
Add to cart
Ultratech Stepper, UTS, Laser Optic Reflective Reticle Fixture, 3-3/8'' OAL x 3-1/8'' W

Ultratech Stepper, UTS, Laser Optic Reflective Reticle Fixture, 3-3/8" OAL x 3-1/8" W Used condition, with normal signs of wear. Comes as shown, please check pics....

Ultratech Stepper, UTS, Laser Optic Reflective Reticle Fixture, 3-3/8" OAL x 3-1/8" W Used condit...

In Stock
$104.95
Add to cart
Ultratech Stepper, UTS, Reflective Laser Optic Reticle Fixture, 2-5/8'' OAL x 1-3/8'' W

Ultratech Stepper, UTS, Reflective Laser Optic Reticle Fixture, 2-5/8" OAL x 1-3/8" W Used condition, with normal signs of wear. Comes as shown, please check pics....

Ultratech Stepper, UTS, Reflective Laser Optic Reticle Fixture, 2-5/8" OAL x 1-3/8" W Used condit...

In Stock
$75.95
Add to cart
Ultratech Stepper, UTS, 690-0130-001, Laser Optic Reflective Prism Fixture, 1-3/4'' OAL x 1-5/8'' W

Ultratech Stepper, UTS, 690-0130-001, Laser Optic Reflective Prism Fixture, 1-3/4" OAL x 1-5/8" W Used condition, with normal signs of wear. Comes as shown, please check...

Ultratech Stepper, UTS, 690-0130-001, Laser Optic Reflective Prism Fixture, 1-3/4" OAL x 1-5/8" W...

In Stock
$87.95
Add to cart
Ultratech Stepper 05-20-01189-01 Rev. A Cable Assembly

Ultratech Stepper 05-20-01189-01 Rev. A Cable Assembly Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper 05-20-01189-01 Rev. A Cable Assembly Used condition, with normal signs of wear....

In Stock
$34.95
Add to cart
Ultratech Stepper 05-15-02047 Rev. B1 Cable Assembly

Ultratech Stepper 05-15-02047 Rev. B1 Cable Assembly Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper 05-15-02047 Rev. B1 Cable Assembly Used condition, with normal signs of wear. C...

In Stock
$45.95
Add to cart
Ultratech Stepper, UTS, Lens Housing Fixture, 2-7/8'' W

Ultratech Stepper, UTS, Lens Housing Fixture, 2-7/8" WUsed condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper, UTS, Lens Housing Fixture, 2-7/8" WUsed condition, with normal signs of wear. ...

In Stock
$10.95
Add to cart
Ultratech Stepper, UTS, Lens Fixture Housing, 2-3/8'' W x 1''

Ultratech Stepper, UTS, Lens Fixture Housing, 2-3/8" W x 1" Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper, UTS, Lens Fixture Housing, 2-3/8" W x 1" Used condition, with normal signs of ...

In Stock
$9.95
Add to cart
Ultratech Stepper 05-2003458-03 Rev. A Wafer Chuck Housing Assembly Theta

Ultratech Stepper 05-2003458-03 Rev. A Wafer Chuck Housing Assembly Theta Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper 05-2003458-03 Rev. A Wafer Chuck Housing Assembly Theta Used condition, with no...

In Stock
$140.95
Add to cart
Ultratech Stepper, UTS, Laser Optic Reticle Fixture, 2-1/2'' OAL x 3-1/8'' W

Ultratech Stepper, UTS, Laser Optic Reticle Fixture, 2-1/2" OAL x 3-1/8" W Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper, UTS, Laser Optic Reticle Fixture, 2-1/2" OAL x 3-1/8" W Used condition, with n...

In Stock
$75.95
Add to cart
Ultratech Stepper Theta Wafer Fixture Assembly 17'' x 4-1/4''

Ultratech Stepper Theta Wafer Fixture Assembly 17" x 4-1/4"Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper Theta Wafer Fixture Assembly 17" x 4-1/4"Used condition, with normal signs of w...

In Stock
$69.95
Add to cart
Ultratech Stepper, UTS, Reflective Laser Optic Reticle Fixture Piece, 4-1/2'' OAL x 3/4'' W

Ultratech Stepper, UTS, Reflective Laser Optic Reticle Fixture Piece, 4-1/2" OAL x 3/4" W Used condition, with normal signs of wear. Comes as shown, please check...

Ultratech Stepper, UTS, Reflective Laser Optic Reticle Fixture Piece, 4-1/2" OAL x 3/4" W Used co...

In Stock
$79.95
Add to cart
Ultratech Stepper, UTS, Fixture Plate, 3-7/8'' OAL x 1-3/4'' W

Ultratech Stepper, UTS, Fixture Plate, 3-7/8" OAL x 1-3/4" W Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper, UTS, Fixture Plate, 3-7/8" OAL x 1-3/4" W Used condition, with normal signs of...

In Stock
$27.95
Add to cart
Ultratech Stepper, UTS, Fixture Plate, 3-1/8'' OAL x 1-3/4'' W

Ultratech Stepper, UTS, Fixture Plate, 3-1/8" OAL x 1-3/4" W Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper, UTS, Fixture Plate, 3-1/8" OAL x 1-3/4" W Used condition, with normal signs of...

In Stock
$25.95
Add to cart
Ultratech Stepper 04-17-00047 Illuminator Exposure Detector Focus 4700 Titan Assy

Ultratech Stepper 04-17-00047 Illuminator Exposure Detector Focus 4700 Titan AssyUsed condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper 04-17-00047 Illuminator Exposure Detector Focus 4700 Titan AssyUsed condition, ...

In Stock
$354.95
Add to cart
Ultratech Stepper, UTS, Reflective Reticle Laser Optic Machine Fixture, 2-7/8'' OAL x 1-1/2'' W

Ultratech Stepper, UTS, Reflective Reticle Laser Optic Machine Fixture, 2-7/8" OAL x 1-1/2" W Used condition, with normal signs of wear. Comes as shown, please check...

Ultratech Stepper, UTS, Reflective Reticle Laser Optic Machine Fixture, 2-7/8" OAL x 1-1/2" W Use...

In Stock
$44.95
Add to cart
Ultratech Stepper, UTS, Reflective Reticle Laser Optic Fixture, 4-3/8'' OAL x 1-1/8'' W

Ultratech Stepper, UTS, Reflective Reticle Laser Optic Fixture, 4-3/8" OAL x 1-1/8" W Used condition, with normal signs of wear. Comes as shown, please check pics....

Ultratech Stepper, UTS, Reflective Reticle Laser Optic Fixture, 4-3/8" OAL x 1-1/8" W Used condit...

In Stock
$75.95
Add to cart
Ultratech Stepper, UTS, Laser Optic Fixture Machine Piece, 4-1/4'' L x 2'' W

Ultratech Stepper, UTS, Laser Optic Fixture Machine Piece, 4-1/4" L x 2" WUsed condition, with normal signs of wear. Comes as shown, please check pics....

Ultratech Stepper, UTS, Laser Optic Fixture Machine Piece, 4-1/4" L x 2" WUsed condition, with no...

In Stock
$48.95
Add to cart
Ultratech Stepper 01-20-05089 Rev. E Output Arm & Laser Interlock Assy

Ultratech Stepper 01-20-05089 Rev. E Output Arm & Laser Interlock Assy Includes everything as shownUsed condition, with normal signs of wear. Comes as shown, please...

Ultratech Stepper 01-20-05089 Rev. E Output Arm & Laser Interlock Assy Includes everything as...

In Stock
$247.95
Add to cart
RPS Radiation Power Systems Igniter Module Ultratech 4700 05-15-02047

RPS Radiation Power Systems Igniter Module Ultratech 4700 05-15-02047Used condition, with normal signs of wear. Comes as shown, please check pics.

RPS Radiation Power Systems Igniter Module Ultratech 4700 05-15-02047Used condition, with normal ...

In Stock
$347.95
Add to cart
Ultratech Stepper KS Equipment 6'' Sarrojet Chuck

Ultratech Stepper KS Equipment 6" Sarrojet Chuck Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper KS Equipment 6" Sarrojet Chuck Used condition, with normal signs of wear. Comes...

In Stock
$188.95
Add to cart
Ultratech Stepper 1053-627300 PCB Fixture Assembly

Ultratech Stepper 1053-627300 PCB Fixture Assembly Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper 1053-627300 PCB Fixture Assembly Used condition, with normal signs of wear. Com...

In Stock
$45.95
Add to cart
Ultratech Stepper V004-003 Pneumatic Panel I/O PCB Board Module

Ultratech Stepper V004-003 Pneumatic Panel I/O PCB Board Module Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper V004-003 Pneumatic Panel I/O PCB Board Module Used condition, with normal signs...

In Stock
$45.95
Add to cart

Reliable Industrial Solutions

Performance You Can Count On

We supply the critical automation, electrical, and MRO parts your facility relies on. Whether you need a rare legacy component or a cost-effective surplus replacement, we keep your operations online.

Learn About Us
Parts in Stock 200,000+
Warranty 60 Day
Shipping To 100+ Countries
On All Orders Free Shipping
Established 2017
Trusted By 50,000+
Handling Same Day Shipping
Part Numbers 60,000+
Have surplus or excess inventory to sell? Send us your parts list and we’ll make you an offer. We cover the shipping.