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Ultratech

Shop 660+ surplus Ultratech parts at VB Industrial Supply, including stepper circuit boards, microscope components, cables and stepper drives.

More about our Ultratech inventory

Ultratech parts we stock

We currently have 660+ Ultratech parts in stock. The most common types:

Popular Ultratech part number series

Series we stock most often include 1052, 1064, 1002, 690, 644, 0564, 1005 and 1024. Search the full Ultratech part number from the search bar to find an exact match, and check the suffix or revision letter against the part you're replacing.

Ultratech surplus parts FAQ

Are these Ultratech parts new or used?

Every listing is graded either New Old Stock, meaning unused surplus that is often still in the original packaging, or Used. The condition is stated on each product page.

How do I find the right Ultratech replacement part?

Search the exact Ultratech part or catalog number from the search bar at the top of the page. If you can't find it, contact us with the part number and we'll check our inventory.

Do you buy surplus Ultratech parts?

Yes. We buy excess, obsolete and decommissioned industrial inventory, including Ultratech parts. Sell us your surplus.

Is VB Industrial Supply an authorized Ultratech distributor?

No. VB Industrial Supply is an independent surplus reseller and is not affiliated with Ultratech. Brand names and part numbers are used only to identify the products we sell.

Showing 145–192 of 665 products
Ultratech Stepper Laser Optic Prism Lens Inspection 1'' x 3/4'' diameter

Ultratech Stepper Laser Optic Prism Lens Inspection 1" x 3/4" diameterUsed condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper Laser Optic Prism Lens Inspection 1" x 3/4" diameterUsed condition, with normal...

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$10.95
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Ultratech Stepper Laser Optic Prism Lens Inspection Housing Only 1-3/4'' OAL

Ultratech Stepper Laser Optic Prism Lens Inspection Housing Only 1-3/4" OALUsed condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper Laser Optic Prism Lens Inspection Housing Only 1-3/4" OALUsed condition, with n...

In Stock
$9.95
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Ultratech Stepper 21AER WG LICA Laser Optic Prism Lens Inspection, 2-1/8''

Ultratech Stepper 21AER WG LICA Laser Optic Prism Lens Inspection, 2-1/8"Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper 21AER WG LICA Laser Optic Prism Lens Inspection, 2-1/8"Used condition, with nor...

In Stock
$29.95
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Ultratech Stepper 10062551000 Rev. D Manifold Hose Fittings

Ultratech Stepper 10062551000 Rev. D Manifold Hose Fittings Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper 10062551000 Rev. D Manifold Hose Fittings Used condition, with normal signs of ...

In Stock
$22.95
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Ultratech Stepper Optic Lens Part, 7'' x 4''

Ultratech Stepper Optic Lens Part, 7" x 4" Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper Optic Lens Part, 7" x 4" Used condition, with normal signs of wear. Comes as sh...

In Stock
$45.95
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Ultratech Stepper 03-20-02114 Rev. A Board, Interconn, Transfer Arm, PCB

Ultratech Stepper 03-20-02114 Rev. A Board, Interconn, Transfer Arm, PCBUsed condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper 03-20-02114 Rev. A Board, Interconn, Transfer Arm, PCBUsed condition, with norm...

In Stock
$69.95
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Ultratech Stepper 0594-701272 Rev. D Reticle Slider Assembly Part

Ultratech Stepper 0594-701272 Rev. D Reticle Slider Assembly Part Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper 0594-701272 Rev. D Reticle Slider Assembly Part Used condition, with normal sig...

In Stock
$27.95
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Ultratech Stepper 690-9959-001 Vacuum Chuck Ring Plate Ring Seal

Ultratech Stepper 690-9959-001 Vacuum Chuck Ring Plate Ring Seal Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper 690-9959-001 Vacuum Chuck Ring Plate Ring Seal Used condition, with normal sign...

In Stock
$22.95
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Lot of 2 Ultratech Stepper, UTS, Replacement Parts, 3-7/8'' OAL x 7/8'' W

Lot of 2 Ultratech Stepper, UTS, Replacement Parts, 3-7/8" OAL x 7/8" W Used condition, with normal signs of wear. Comes as shown, please check pics....

Lot of 2 Ultratech Stepper, UTS, Replacement Parts, 3-7/8" OAL x 7/8" W Used condition, with norm...

In Stock
$27.95
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Ultratech Stepper, UTS, Optical Prism, 2-3/4'' OAL

Ultratech Stepper, UTS, Optical Prism, 2-3/4" OAL Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper, UTS, Optical Prism, 2-3/4" OAL Used condition, with normal signs of wear. Come...

In Stock
$23.95
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Ultratech Stepper, Part: 0566-700065, Rev: F Spring Blade Machine Part, Stage Slider

Ultratech Stepper, Part: 0566-700065, Rev: F Spring Blade Machine Part, Stage Slider Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper, Part: 0566-700065, Rev: F Spring Blade Machine Part, Stage Slider Used conditi...

In Stock
$374.95
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Ultratech Stepper, UTS, Threaded Fixture Piece, 2'' W x 3/4'' H

Ultratech Stepper, UTS, Threaded Fixture Piece, 2" W x 3/4" H Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper, UTS, Threaded Fixture Piece, 2" W x 3/4" H Used condition, with normal signs o...

In Stock
$21.95
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Ultratech Stepper Wafer Chuck Assembly 01-20-03947 Rapidsyn 13D-04A Stepper Motor

 Ultratech Stepper Wafer Chuck Assembly 01-20-03947 Rapidsyn 13D-04A Stepper Motor  Includes everything as shown 7-3/4" ChuckUsed condition, with normal signs of wear. Comes as shown,...

 Ultratech Stepper Wafer Chuck Assembly 01-20-03947 Rapidsyn 13D-04A Stepper Motor  Includes ever...

In Stock
$997.95
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Ultratech Stepper 03-15-04253 Power Driver Backplane Schroff 10 Slot Chassis

Ultratech Stepper 03-15-04253 Power Driver Backplane Schroff 10 Slot Chassis  13-15-04253 Rev. A Used condition, with normal signs of wear. Comes as shown, please check pics....

Ultratech Stepper 03-15-04253 Power Driver Backplane Schroff 10 Slot Chassis  13-15-04253 Rev. A ...

In Stock
$447.95
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Ultratech Stepper 01-17-00006 Rev. D Photomultiplier Lens Alignment Assembly 4700

Ultratech Stepper 01-17-00006 Rev. D Photomultiplier Lens Alignment Assembly 4700 Includes everything as shown Untested Used condition, with normal signs of wear. Comes as shown, please...

Ultratech Stepper 01-17-00006 Rev. D Photomultiplier Lens Alignment Assembly 4700 Includes everyt...

In Stock
$997.95
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NEW Ultratech Stepper 508 Optical Lens Mirror Reflective, 9-3/4'' Dia x 2-1/2''

NEW Ultratech Stepper 508 Optical Lens Mirror Reflective, 9-3/4" Dia x 2-1/2"NOS, surplus no box. Minor storage wear, comes as shown.

NEW Ultratech Stepper 508 Optical Lens Mirror Reflective, 9-3/4" Dia x 2-1/2"NOS, surplus no box....

In Stock
$354.95
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BICC VERO 415-55725 VME Bus J2 Backplane Board PCB Ultratech Stepper

BICC VERO 415-55725 VME Bus J2 Backplane Board PCB Ultratech StepperUsed condition, with normal signs of wear. Comes as shown, please check pics.

BICC VERO 415-55725 VME Bus J2 Backplane Board PCB Ultratech StepperUsed condition, with normal s...

In Stock
$140.95
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BICC VERO 243-39122C VME I/O Channel Backplane Board PCB Ultratech Stepper

BICC VERO 243-39122C VME I/O Channel Backplane Board PCB Ultratech StepperUsed condition, with normal signs of wear. Comes as shown, please check pics.

BICC VERO 243-39122C VME I/O Channel Backplane Board PCB Ultratech StepperUsed condition, with no...

In Stock
$140.95
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Ultratech Stepper Wafer Holder End Effector Transfer Assembly 9-1/4''

Ultratech Stepper Wafer Holder End Effector Transfer Assembly 9-1/4"Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper Wafer Holder End Effector Transfer Assembly 9-1/4"Used condition, with normal s...

In Stock
$45.95
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Ultratech Stepper, UTS, Optical Lens Piece 2-1/4'' Yellow

Ultratech Stepper, UTS, Optical Lens Piece 2-1/4" Yellow Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper, UTS, Optical Lens Piece 2-1/4" Yellow Used condition, with normal signs of wea...

In Stock
$13.95
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Ultratech Stepper, UTS, Optical Lens Piece Angle Mirror 1-5/8'' x 1''

Ultratech Stepper, UTS, Optical Lens Piece Angle Mirror 1-5/8" x 1"Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper, UTS, Optical Lens Piece Angle Mirror 1-5/8" x 1"Used condition, with normal si...

In Stock
$13.95
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Ultratech Stepper 877-8134-003 Lens Fixture Plate Holder

Ultratech Stepper 877-8134-003 Lens Fixture Plate Holder Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper 877-8134-003 Lens Fixture Plate Holder Used condition, with normal signs of wea...

In Stock
$9.95
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Ultratech Stepper, UTS, Optical Lens Piece 1-5/8'' OAL 3/4'' Dia.

Ultratech Stepper, UTS, Optical Lens Piece 1-5/8" OAL 3/4" Dia.Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper, UTS, Optical Lens Piece 1-5/8" OAL 3/4" Dia.Used condition, with normal signs ...

In Stock
$10.95
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Ultratech Stepper, UTS, Optical Lens Mirror Reflective 3-1/8'' x 3''

Ultratech Stepper, UTS, Optical Lens Mirror Reflective 3-1/8" x 3"Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper, UTS, Optical Lens Mirror Reflective 3-1/8" x 3"Used condition, with normal sig...

In Stock
$14.95
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Ultratech Stepper Gold Purple Optic Lens Reflector Mirror

Ultratech Stepper Gold Purple Optic Lens Reflector Mirror Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper Gold Purple Optic Lens Reflector Mirror Used condition, with normal signs of we...

In Stock
$13.95
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Ultratech Stepper, UTS, Machine Arm Slider, 8-1/4'' W x 9'' OAL

Ultratech Stepper, UTS, Machine Arm Slider, 8-1/4" W x 9" OAL Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper, UTS, Machine Arm Slider, 8-1/4" W x 9" OAL Used condition, with normal signs o...

In Stock
$19.95
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Ultratech Stepper, UTS, Machine Arm Assembly, Slider Fixture, 9'' OAL x 8-1/4'' W

Ultratech Stepper, UTS, Machine Arm Assembly, Slider Fixture, 9" OAL x 8-1/4" W Used condition, with normal signs of wear. Comes as shown, please check pics....

Ultratech Stepper, UTS, Machine Arm Assembly, Slider Fixture, 9" OAL x 8-1/4" W Used condition, w...

In Stock
$18.95
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Ultratech Stepper, UTS Machine Arm Assembly, 8-1/4'' W x 9'' L

Ultratech Stepper, UTS Machine Arm Assembly, 8-1/4" W x 9" L Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper, UTS Machine Arm Assembly, 8-1/4" W x 9" L Used condition, with normal signs of...

In Stock
$19.95
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Ultratech Stepper, UTS, Model: 1052-669900 REV. A, 8-1/4'' OAL x 9'' W

Ultratech Stepper, UTS, Model: 1052-669900 REV. A, 8-1/4" OAL x 9" W Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper, UTS, Model: 1052-669900 REV. A, 8-1/4" OAL x 9" W Used condition, with normal ...

In Stock
$22.95
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Ultratech Stepper Plug Receptacle 3 Prong

Ultratech Stepper Plug Receptacle 3 Prong Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper Plug Receptacle 3 Prong Used condition, with normal signs of wear. Comes as sho...

In Stock
$9.95
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Ultratech Stepper Optical Edge Switch Sensor Cover SEI OES Cover 4'' OAL

Ultratech Stepper Optical Edge Switch Sensor Cover SEI OES Cover 4" OALUsed condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper Optical Edge Switch Sensor Cover SEI OES Cover 4" OALUsed condition, with norma...

In Stock
$9.95
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Ultratech Stepper 01-20-03947 Theta Stage Drive Assembly Rev. M No Chuck Included

Ultratech Stepper 01-20-03947 Theta Stage Drive Assembly Rev. M No Chuck Included Includes eveyrthing as shownUsed condition, with normal signs of wear. Comes as shown,...

Ultratech Stepper 01-20-03947 Theta Stage Drive Assembly Rev. M No Chuck Included Includes eveyrt...

In Stock
$461.95
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Ultratech Stepper, UTS, Autoloader Arm Replacement Part, 5-7/8'' W 5-1/4'' OAL

Ultratech Stepper, UTS, Autoloader Arm Replacement Part, 5-7/8" W 5-1/4" OAL Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper, UTS, Autoloader Arm Replacement Part, 5-7/8" W 5-1/4" OAL Used condition, with...

In Stock
$9.95
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Ultratech Stepper, UTS, Autoload Machine Arm Assembly, 8-1/2'' OAL x 7'' W

Ultratech Stepper, UTS, Autoload Machine Arm Assembly, 8-1/2" OAL x 7" W Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper, UTS, Autoload Machine Arm Assembly, 8-1/2" OAL x 7" W Used condition, with nor...

In Stock
$57.95
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Ultratech Stepper, UTS, Machine Arm Assembly, 8-1/2'' OAL x 7'' W

Ultratech Stepper, UTS, Machine Arm Assembly, 8-1/2" OAL x 7" W Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper, UTS, Machine Arm Assembly, 8-1/2" OAL x 7" W Used condition, with normal signs...

In Stock
$54.95
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Ultratech Stepper, UTS, Model: 1002-343600-B, Threaded Fixture

Ultratech Stepper, UTS, Model: 1002-343600-B, Threaded Fixture Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper, UTS, Model: 1002-343600-B, Threaded Fixture Used condition, with normal signs ...

In Stock
$11.95
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Ultratech Stepper, UTS, Housing Cover, 4'' OAL x 2'' W

Ultratech Stepper, UTS, Housing Cover, 4" OAL x 2" W Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper, UTS, Housing Cover, 4" OAL x 2" W Used condition, with normal signs of wear. C...

In Stock
$9.95
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Ultratech Stepper 0564-700064 Rev. B1 Optic Laser Assembly Lens Housing

Ultratech Stepper 0564-700064 Rev. B1 Optic Laser Assembly Lens HousingUsed condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper 0564-700064 Rev. B1 Optic Laser Assembly Lens HousingUsed condition, with norma...

In Stock
$140.95
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Ultratech Stepper 0564-700064 Rev. B Laser Assembly Optics 1064-700063

Ultratech Stepper 0564-700064 Rev. B Laser Assembly Optics 1064-700063Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper 0564-700064 Rev. B Laser Assembly Optics 1064-700063Used condition, with normal...

In Stock
$140.95
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Ultratech Stepper 0564-700064 Rev. B1 Laser Optic Assembly 1064-700063 Rev. A

Ultratech Stepper 0564-700064 Rev. B1 Laser Optic Assembly 1064-700063 Rev. AUsed condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper 0564-700064 Rev. B1 Laser Optic Assembly 1064-700063 Rev. AUsed condition, with...

In Stock
$140.95
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Ultratech Stepper 0556-700328 4'' Round Wafer Chuck Assembly

Ultratech Stepper 0556-700328 4" Round Wafer Chuck Assembly Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper 0556-700328 4" Round Wafer Chuck Assembly Used condition, with normal signs of ...

In Stock
$92.95
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Ultratech Stepper 4-1/2'' Round Wafer Chuck Assembly Fitting

Ultratech Stepper 4-1/2'' Round Wafer Chuck Assembly Fitting Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper 4-1/2'' Round Wafer Chuck Assembly Fitting Used condition, with normal signs of...

In Stock
$69.95
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Ultratech Stepper 4-1/2'' Round Wafer Chuck Assembly Aluminum

Ultratech Stepper 4-1/2'' Round Wafer Chuck Assembly Aluminum Used condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper 4-1/2'' Round Wafer Chuck Assembly Aluminum Used condition, with normal signs o...

In Stock
$69.95
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Ultratech Stepper 4-1/2'' Round Wafer Chuck Aluminum Center Hole

Ultratech Stepper 4-1/2'' Round Wafer Chuck Aluminum Center HoleUsed condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper 4-1/2'' Round Wafer Chuck Aluminum Center HoleUsed condition, with normal signs...

In Stock
$69.95
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Ultratech Stepper 10-15-02616 Rev. B Transfer Arm Wafer Loader Part

Ultratech Stepper 10-15-02616 Rev. B Transfer Arm Wafer Loader Part  16-1/2" x 6-1/2" Used condition, with normal signs of wear. Comes as shown, please check pics....

Ultratech Stepper 10-15-02616 Rev. B Transfer Arm Wafer Loader Part  16-1/2" x 6-1/2" Used condit...

In Stock
$141.95
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Ultratech Stepper Lens Optics Assembly Part 14-1/2'' OAL

Ultratech Stepper Lens Optics Assembly Part 14-1/2" OAL Includes everything as shownUsed condition, with normal signs of wear. Comes as shown, please check pics.

Ultratech Stepper Lens Optics Assembly Part 14-1/2" OAL Includes everything as shownUsed conditio...

In Stock
$69.95
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Ultratech Stepper M-098 Photomultiplier Lens Alignment Chuck Mirror Assembly

Ultratech Stepper M-098 Photomultiplier Lens Alignment Chuck Mirror Assembly 12-3/4" OD x 10-1/2" Used condition, with normal signs of wear. Comes as shown, please check...

Ultratech Stepper M-098 Photomultiplier Lens Alignment Chuck Mirror Assembly 12-3/4" OD x 10-1/2"...

In Stock
$658.95
Add to cart
Ultratech Stepper Linear Slide Assembly 1500 HL.31 1500 HR.31 14'' OAL

Ultratech Stepper Linear Slide Assembly 1500 HL.31 1500 HR.31 14" OAL Includes everything as shownUsed condition, with normal signs of wear. Comes as shown, please...

Ultratech Stepper Linear Slide Assembly 1500 HL.31 1500 HR.31 14" OAL Includes everything as show...

In Stock
$141.95
Add to cart

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